Belmahi, M., Institut Jean Lamour (IJL) CNRS UMR 7198, Université de Lorraine, Faculté des Sciences et Technologies, BP 239, F-54506 Vandoeuvre Cedex, France

• Journal of Surface Science and Technology Volume 33, Issue 1-2, June 2017 - Articles
  Silicon Carbon Nitride Thin Films Produced by Magnetron Reactive Sputtering Physical Vapour Deposition: Structural, Chemical and Mechanical Characterisation
  Abstract