Gourbilleau, Fabrice, CIMAP CNRS/CEA/ENSICAEN/Normandie Université 6 Bd Maréchal Juin, 14050 Caen Cedex 4, France

• Journal of Surface Science and Technology Volume 35, Issue 3-4, December 2019 - Articles
  Synthesis and Characterization of a-Si_xC_y Thin Films Prepared by RF Magnetron Co-Sputtering Technique
  Abstract