Kouakou P, Yoboue P, Ouattara B, Hody V, Choquet P, Belmahi M. Silicon Carbon Nitride Thin Films Produced by Magnetron Reactive Sputtering Physical Vapour Deposition: Structural, Chemical and Mechanical Characterisation. JSST [Internet]. 2017 Jul. 24 [cited 2024 May 4];33(1-2):44–52. Available from: https://www.informaticsjournals.com/index.php/jsst/article/view/11022