Choquet, P., C. R. P. Gabriel Lippmann, S. A. M., 41 rue du Brill, L-4422 Belvaux, Luxembourg

• Journal of Surface Science and Technology Volume 33, Issue 1-2, June 2017 - Articles
  Silicon Carbon Nitride Thin Films Produced by Magnetron Reactive Sputtering Physical Vapour Deposition: Structural, Chemical and Mechanical Characterisation
  Abstract